Ionized physical vapor deposition
by
 
Hopwood, Jeffrey A.

Title
: 
Ionized physical vapor deposition

Author
: 
Hopwood, Jeffrey A.

ISBN
: 
9780125330275

Publication Information
: 
San Diego : Academic Press, c2000.

Physical Description
: 
1 online resource (xii, 253 p.) : ill.

Series
: 
Thin films ; v. 27

Series Title
: 
Thin films ; v. 27

Subject Term
: 
Thin film devices -- Design and construction.
 
Physical vapor deposition.
 
Thin films.

Genre
: 
Electronic books.

Added Author
: 
Hopwood, Jeffrey A.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330275


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256314-1001ONLINEElektronik Kütüphane