PVD for microelectronics sputter deposition applied to semiconductor manufacturing
by
Powell, Ronald A.
Title
:
PVD for microelectronics sputter deposition applied to semiconductor manufacturing
Author
:
Powell, Ronald A.
ISBN
:
9780125330268
Publication Information
:
San Diego : Academic Press, c1999.
Physical Description
:
1 online resource (xiii, 419 p.) : ill.
Series
:
Thin films ; v. 26
Series Title
:
Thin films ; v. 26
Subject Term
:
Thin film devices -- Design and construction.
Vapor-plating.
Thin films.
Added Author
:
Rossnagel, Stephen M.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 256315-1001 | ONLINE | | Elektronik Kütüphane |