PVD for microelectronics sputter deposition applied to semiconductor manufacturing
by
 
Powell, Ronald A.

Title
: 
PVD for microelectronics sputter deposition applied to semiconductor manufacturing

Author
: 
Powell, Ronald A.

ISBN
: 
9780125330268

Publication Information
: 
San Diego : Academic Press, c1999.

Physical Description
: 
1 online resource (xiii, 419 p.) : ill.

Series
: 
Thin films ; v. 26

Series Title
: 
Thin films ; v. 26

Subject Term
: 
Thin film devices -- Design and construction.
 
Vapor-plating.
 
Thin films.

Added Author
: 
Rossnagel, Stephen M.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330268


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256315-1001ONLINEElektronik Kütüphane