Plasma deposition of amorphous silicon-based materials
by
Bruno, Giovanni.
Title
:
Plasma deposition of amorphous silicon-based materials
Author
:
Bruno, Giovanni.
ISBN
:
9780121379407
Publication Information
:
Boston : Academic Press, c1995.
Physical Description
:
1 online resource (xi, 324 p.) : ill.
Series
:
Plasma--materials interactions
Series Title
:
Plasma--materials interactions
Subject Term
:
Amorphous semiconductors -- Design and construction.
Silicon alloys.
Plasma-enhanced chemical vapor deposition.
Added Author
:
Bruno, Giovanni.
Capezzuto, Pio.
Madan, A. (Arun)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 256317-1001 | ONLINE | | Elektronik Kütüphane |