Plasma deposition of amorphous silicon-based materials
by
 
Bruno, Giovanni.

Title
: 
Plasma deposition of amorphous silicon-based materials

Author
: 
Bruno, Giovanni.

ISBN
: 
9780121379407

Publication Information
: 
Boston : Academic Press, c1995.

Physical Description
: 
1 online resource (xi, 324 p.) : ill.

Series
: 
Plasma--materials interactions

Series Title
: 
Plasma--materials interactions

Subject Term
: 
Amorphous semiconductors -- Design and construction.
 
Silicon alloys.
 
Plasma-enhanced chemical vapor deposition.

Added Author
: 
Bruno, Giovanni.
 
Capezzuto, Pio.
 
Madan, A. (Arun)

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780121379407


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256317-1001ONLINEElektronik Kütüphane