Optical diagnostics for thin film processing
by
Herman, Irving P.
Title
:
Optical diagnostics for thin film processing
Author
:
Herman, Irving P.
ISBN
:
9780123420701
9780080538082
9781281033024
Publication Information
:
San Diego, CA : Academic Press, c1996.
Physical Description
:
1 online resource (xxix, 783 p.) : ill.
Subject Term
:
Thin films -- Surfaces.
Spectrum analysis -- Industrial applications.
Genre
:
Electronic books.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 256319-1001 | ONLINE | | Elektronik Kütüphane |