Modeling of film deposition for microelectronic applications
by
 
Rossnagel, Stephen M.

Title
: 
Modeling of film deposition for microelectronic applications

Author
: 
Rossnagel, Stephen M.

ISBN
: 
9780125330220

Publication Information
: 
San Diego : Academic Press, c1996.

Physical Description
: 
1 online resource (xiv, 291 p.) : ill.

Series
: 
Thin films ; v. 22

Series Title
: 
Thin films ; v. 22

Subject Term
: 
Thin films -- Computer simulation -- Congresses.

Added Author
: 
Rossnagel, Stephen M.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780125330220


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book256322-1001ONLINEElektronik Kütüphane