Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
by
International Conference on Rapid Thermal Processing for Future Semiconductor Devices (2nd : 2001 : Ise-Shima, Mie, Japan)
Title
:
Rapid thermal processing for future semiconductor devices proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
Author
:
International Conference on Rapid Thermal Processing for Future Semiconductor Devices (2nd : 2001 : Ise-Shima, Mie, Japan)
ISBN
:
9780444513397
9780080540269
Conference Author
:
International Conference on Rapid Thermal Processing for Future Semiconductor Devices (2nd : 2001 : Ise-Shima, Mie, Japan)
Publication Information
:
Amsterdam ; London : Elsevier, 2003.
Physical Description
:
1 online resource (x, 150 p.) : ill.
Subject Term
:
Semiconductors -- Heat treatment -- Congresses.
Rapid thermal processing -- Congresses.
Semiconductors -- Heat treatment -- Congresses. Rapid thermal processing -- Congresses.
Added Author
:
Fukuda, Hisashi.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 256371-1001 | ONLINE | | Elektronik Kütüphane |