Vacuum technology, thin films, and sputtering an introduction
by
 
Stuart, R. V.

Title
: 
Vacuum technology, thin films, and sputtering an introduction

Author
: 
Stuart, R. V.

ISBN
: 
9780126747805
 
9780323139151

Publication Information
: 
New York : Academic Press, 1983.

Physical Description
: 
1 online resource (viii, 151 pages) : illustrations

Subject Term
: 
Vacuum technology.
 
Thin films.
 
Cathode sputtering (Plating process)

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780126747805


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book257777-1001ONLINEElektronik Kütüphane