Vacuum technology, thin films, and sputtering an introduction
by
Stuart, R. V.
Title
:
Vacuum technology, thin films, and sputtering an introduction
Author
:
Stuart, R. V.
ISBN
:
9780126747805
9780323139151
Publication Information
:
New York : Academic Press, 1983.
Physical Description
:
1 online resource (viii, 151 pages) : illustrations
Subject Term
:
Vacuum technology.
Thin films.
Cathode sputtering (Plating process)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 257777-1001 | ONLINE | | Elektronik Kütüphane |