Ion implantation science and technology
by
 
Ziegler, J. F. (James F.)

Title
Ion implantation science and technology

Author
Ziegler, J. F. (James F.)

ISBN
9780127806204

Publication Information
Orlando : Academic Press, 1984.

Physical Description
1 online resource (xi, 635 p.) : ill.

Subject Term
Ion implantation.
 
Aufsatzsammlung.
 
Ionenimplantation.

Added Author
Ziegler, J. F. (James F.)

Electronic Access
ScienceDirect http://www.sciencedirect.com/science/book/9780127806204


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book257881-1001ONLINEElektronik Kütüphane