Ion implantation science and technology
by
Ziegler, J. F. (James F.)
Title
:
Ion implantation science and technology
Author
:
Ziegler, J. F. (James F.)
ISBN
:
9780127806204
Publication Information
:
Orlando : Academic Press, 1984.
Physical Description
:
1 online resource (xi, 635 p.) : ill.
Subject Term
:
Ion implantation.
Aufsatzsammlung.
Ionenimplantation.
Added Author
:
Ziegler, J. F. (James F.)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 257881-1001 | ONLINE | | Elektronik Kütüphane |