Ion beam assisted film growth
by
 
Itoh, Tadatsugu.

Title
: 
Ion beam assisted film growth

Author
: 
Itoh, Tadatsugu.

ISBN
: 
9780444872807

Publication Information
: 
Amsterdam ; New York : Elsevier, 1989.

Physical Description
: 
1 online resource (xvii, 439 p.) : ill.

Series
: 
Beam modification of materials ; 3

Series Title
: 
Beam modification of materials ; 3

Subject Term
: 
Thin films, Multilayered.
 
Ion bombardment.
 
Sputtering (Physics)
 
Semiconductor films.
 
Schichtwachstum
 
Ionenstrahl
 
Dünnschichttechnik
 
Ionenstrahlbearbeitung

Added Author
: 
Itoh, Tadatsugu.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780444872807


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book257997-1001ONLINEElektronik Kütüphane