Ion implantation science and technology
by
 
Ziegler, J. F. (James F.)

Title
: 
Ion implantation science and technology

Author
: 
Ziegler, J. F. (James F.)

ISBN
: 
9780323161657

Edition
: 
2nd ed.

Publication Information
: 
Boston : Academic Press, c1988.

Physical Description
: 
1 online resource (ix, 498 p.) : ill.

Subject Term
: 
Ion implantation.
 
Aufsatzsammlung.
 
Ionenimplantation.

Added Author
: 
Ziegler, J. F. (James F.)

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780127806211


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book258075-1001ONLINEElektronik Kütüphane