Microlithography science and technology
by
Suzuki, Kazuaki.
Title
:
Microlithography science and technology
Author
:
Suzuki, Kazuaki.
ISBN
:
9781420051537
Edition
:
2nd ed.
Publication Information
:
Boca Raton : CRC Press, c2007.
Physical Description
:
848 p. : ill.
Series
:
Optical science and engineering ; 126
Series Title
:
Optical science and engineering ; 126
Subject Term
:
Microlithography -- Industrial applications.
Integrated circuits -- Masks.
Metal oxide semiconductors, Complementary -- Design and construction.
Manufacturing processes.
Added Author
:
Suzuki, Kazuaki.
Smith, Bruce W., 1959-
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 285967-1001 | ONLINE | | Elektronik Kütüphane |