Microlithography science and technology
by
 
Suzuki, Kazuaki.

Title
: 
Microlithography science and technology

Author
: 
Suzuki, Kazuaki.

ISBN
: 
9781420051537

Edition
: 
2nd ed.

Publication Information
: 
Boca Raton : CRC Press, c2007.

Physical Description
: 
848 p. : ill.

Series
: 
Optical science and engineering ; 126

Series Title
: 
Optical science and engineering ; 126

Subject Term
: 
Microlithography -- Industrial applications.
 
Integrated circuits -- Masks.
 
Metal oxide semiconductors, Complementary -- Design and construction.
 
Manufacturing processes.

Added Author
: 
Suzuki, Kazuaki.
 
Smith, Bruce W., 1959-

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book285967-1001ONLINEElektronik Kütüphane