Run-to-run control in semiconductor manufacturing
by
 
Moyne, James.

Title
: 
Run-to-run control in semiconductor manufacturing

Author
: 
Moyne, James.

ISBN
: 
9781420040661

Publication Information
: 
Boca Raton : CRC Press, 2001.

Physical Description
: 
348 p. : ill.

Subject Term
: 
Semiconductors -- Design and construction.
 
Semiconductor industry -- Production control.
 
Electronic packaging.
 
Production management.

Added Author
: 
Moyne, James.
 
Del Castillo, Enrique.
 
Hurwitz, Arnon Max.

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book286773-1001ONLINEElektronik Kütüphane