X-ray metrology in semiconductor manufacturing
by
 
Bowen, D. Keith (David Keith), 1940-

Title
: 
X-ray metrology in semiconductor manufacturing

Author
: 
Bowen, D. Keith (David Keith), 1940-

ISBN
: 
9781420005653

Publication Information
: 
Boca Raton : CRC/Taylor & Francis, 2006.

Physical Description
: 
279 p. : ill.

Subject Term
: 
Semiconductors -- Design and construction -- Quality control.
 
Integrated circuits -- Measurement.
 
Semiconductor wafers -- Inspection.
 
X-rays -- Diffraction.
 
Fluroscopy.

Added Author
: 
Tanner, B. K. (Brian Keith)

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book287443-1001ONLINEElektronik Kütüphane