Nano-CMOS gate dielectric engineering
by
 
Wong, Hei.

Title
: 
Nano-CMOS gate dielectric engineering

Author
: 
Wong, Hei.

ISBN
: 
9781439849606

Publication Information
: 
Boca Raton : CRC Press, 2012.

Physical Description
: 
xiv, 234 p. : ill.

Contents
: 
1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.

Subject Term
: 
Metal oxide semiconductors, Complementary -- Design and construction.
 
Dielectrics.
 
Gate array circuits.
 
Nanoelectronics -- Materials.

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book288028-1001ONLINEElektronik Kütüphane