Semiconductor industry wafer fab exhaust management
by
Sherer, J. Michael, 1958-
Title
:
Semiconductor industry wafer fab exhaust management
Author
:
Sherer, J. Michael, 1958-
ISBN
:
9781420027198
Publication Information
:
Boca Raton : CRC/Taylor & Francis, 2005.
Physical Description
:
194 p.
Subject Term
:
Semiconductor wafers -- Design and construction.
Semiconductor industry -- Environmental aspects.
Volatile organic compounds -- Environmental aspects.
Air -- Purification -- Technological innovations.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 288480-1001 | ONLINE | | Elektronik Kütüphane |