Semiconductor industry wafer fab exhaust management
by
 
Sherer, J. Michael, 1958-

Title
: 
Semiconductor industry wafer fab exhaust management

Author
: 
Sherer, J. Michael, 1958-

ISBN
: 
9781420027198

Publication Information
: 
Boca Raton : CRC/Taylor & Francis, 2005.

Physical Description
: 
194 p.

Subject Term
: 
Semiconductor wafers -- Design and construction.
 
Semiconductor industry -- Environmental aspects.
 
Volatile organic compounds -- Environmental aspects.
 
Air -- Purification -- Technological innovations.

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book288480-1001ONLINEElektronik Kütüphane