Microfabrication and nanomanufacturing
by
 
Jackson, Mark J.

Title
: 
Microfabrication and nanomanufacturing

Author
: 
Jackson, Mark J.

ISBN
: 
9781420028270

Publication Information
: 
Boca Raton, FL : CRC/Taylor & Francis, 2006.

Physical Description
: 
401 p. : ill.

Subject Term
: 
Microelectronics.
 
Integrated circuits -- Design and construction.
 
Microelectromechanical systems -- Design and construction.

Added Author
: 
Jackson, Mark J.

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book288486-1001ONLINEElektronik Kütüphane