Handbook of silicon semiconductor metrology
by
 
Diebold, A. C. (Alain C.)

Title
: 
Handbook of silicon semiconductor metrology

Author
: 
Diebold, A. C. (Alain C.)

ISBN
: 
9780203904541

Publication Information
: 
New York : Marcel Dekker, 2001.

Physical Description
: 
xvi, 874 p. : ill.

Subject Term
: 
Semiconductors -- Measurement.
 
Semiconductors -- Inspection.

Added Author
: 
Diebold, A. C. (Alain C.)

Electronic Access
: 
Distributed by publisher. Purchase or institutional license may be required for access.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book291054-1001ONLINEElektronik Kütüphane