Photomask fabrication technology
by
 
Eynon, Benjamin G.

Title
: 
Photomask fabrication technology

Author
: 
Eynon, Benjamin G.

ISBN
: 
9780071588911
 
9780071445634

Publication Information
: 
New York : McGraw Hill Professional, 2011.

Physical Description
: 
1 electronic text (xi, 571 p. : ill.) : PDF file.

Series
: 
McGraw Hill ebook library. Engineering and computing. Electrical and electronic

Series Title
: 
McGraw Hill ebook library. Engineering and computing. Electrical and electronic

Subject Term
: 
Integrated circuits -- Masks.
 
Masks (Electronics)
 
Microlithography.

Added Author
: 
Wu, Banqiu.

Electronic Access
: 
Subscription required


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book293530-1001ONLINEElektronik Kütüphane