Dielectric films for advanced microelectronics
by
 
Baklanov, Mikhail.

Title
: 
Dielectric films for advanced microelectronics

Author
: 
Baklanov, Mikhail.

ISBN
: 
9780470017944
 
9780470065419

Publication Information
: 
Chichester, England ; Hoboken, NJ : John Wiley & Sons, c2007.

Physical Description
: 
1 online resource (xxii, 486 p.) : ill.

Series
: 
Wiley series in materials for electronic and optoelectronic applications

Series Title
: 
Wiley series in materials for electronic and optoelectronic applications

Subject Term
: 
Dielectric films.
 
Microelectronics -- Materials.

Added Author
: 
Baklanov, Mikhail.
 
Green, Martin.
 
Maex, Karen.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9780470017944


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book296648-1001ONLINEElektronik Kütüphane