Scaling issues and design of MEMS
by
Baglio, S. (Salvatore)
Title
:
Scaling issues and design of MEMS
Author
:
Baglio, S. (Salvatore)
ISBN
:
9780470034071
9780470034088
Publication Information
:
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, c2007.
Physical Description
:
1 online resource (xiii, 229 p.) : ill.
Subject Term
:
Microelectromechanical systems -- Design and construction.
Added Author
:
Castorina, Salvatore.
Savalli, Nicol.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 296717-1001 | ONLINE | | Elektronik Kütüphane |