Scaling issues and design of MEMS
by
 
Baglio, S. (Salvatore)

Title
: 
Scaling issues and design of MEMS

Author
: 
Baglio, S. (Salvatore)

ISBN
: 
9780470034071
 
9780470034088

Publication Information
: 
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, c2007.

Physical Description
: 
1 online resource (xiii, 229 p.) : ill.

Subject Term
: 
Microelectromechanical systems -- Design and construction.

Added Author
: 
Castorina, Salvatore.
 
Savalli, Nicol.

Electronic Access
: 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
 
John Wiley http://dx.doi.org/10.1002/9780470034071


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book296717-1001ONLINEElektronik Kütüphane