Microelectronic applications of chemical mechanical planarization
by
 
Li, Yuzhuo.

Title
: 
Microelectronic applications of chemical mechanical planarization

Author
: 
Li, Yuzhuo.

ISBN
: 
9780470180907

Publication Information
: 
Hoboken, N.J. : Wiley-Interscience, c2008.

Physical Description
: 
xxv, 734 p. : ill. ; 25 cm.

Subject Term
: 
Integrated circuits -- Design and construction.
 
Chemical mechanical planarization.
 
Microelectronics -- Materials.

Added Author
: 
Li, Yuzhuo.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
 
John Wiley http://dx.doi.org/10.1002/9780470180907


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book297048-1001ONLINEElektronik Kütüphane