Ätzverfahren für die Mikrotechnik
by
Köhler, J. M. (J. Michael), 1956-
Title
:
Ätzverfahren für die Mikrotechnik
Author
:
Köhler, J. M. (J. Michael), 1956-
ISBN
:
9783527288694
9783527602919
Publication Information
:
Weinheim : Wiley-VCH, c1998.
Physical Description
:
1 online resource (xvi, 398 p.) : ill.
Subject Term
:
Masks (Electronics)
Microlithography.
Plasma etching.
Added Corporate Author
:
John Wiley & Sons.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 300533-1001 | ONLINE | | Elektronik Kütüphane |