Etching in microsystem technology
by
 
Köhler, J. M. (J. Michael), 1956-

Title
: 
Etching in microsystem technology

Author
: 
Köhler, J. M. (J. Michael), 1956-

ISBN
: 
9783527613786

Uniform Title
: 
Ätzverfahren für die Mikrotechnik. English

Publication Information
: 
Weinheim ; New York : Wiley-VCH, c1999.

Physical Description
: 
xvi, 368 p. : ill. ; 25 cm.

Subject Term
: 
Masks (Electronics)
 
Microlithography.
 
Plasma etching.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527613786


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book300698-1001ONLINEElektronik Kütüphane