Chemical mechanical planarization of microelectronic materials
by
 
Steigerwald, Joseph M.

Title
: 
Chemical mechanical planarization of microelectronic materials

Author
: 
Steigerwald, Joseph M.

ISBN
: 
9783527617746

Publication Information
: 
New York : J. Wiley, c1997.

Physical Description
: 
xiii, 324 p. : ill. ; 24 cm.

Subject Term
: 
Microelectronics -- Materials.
 
Grinding and polishing.
 
Chemical mechanical planarization.

Added Author
: 
Murarka, S. P.
 
Gutmann, Ronald J.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527617746
 
Contributor biographical information http://catdir.loc.gov/catdir/bios/wiley041/96006198.html


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book300816-1001ONLINEElektronik Kütüphane