Handbook of chemicals and gases for the semiconductor industry
by
 
Miśra, Āśutosha, 1970-

Title
Handbook of chemicals and gases for the semiconductor industry

Author
Miśra, Āśutosha, 1970-

ISBN
9780471316718
 
9780471263852

Publication Information
New York : Wiley-VCH, c2002.

Physical Description
1 online resource (xiii, 363 p.) : ill.

Subject Term
Chemicals -- Handbooks, manuals, etc.
 
Semiconductors -- Materials -- Handbooks, manuals, etc.

Added Author
Hogan, Jeremiah D.
 
Chorush, Russell.

Electronic Access
Wiley InterScience An electronic book accessible through the World Wide Web; click for information
 
Access restricted to McGill users
 
HathiTrust Digital Library Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/47863246.html


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book301477-1001ONLINEElektronik Kütüphane