Handbook of chemicals and gases for the semiconductor industry
by
Miśra, Āśutosha, 1970-
Title
:
Handbook of chemicals and gases for the semiconductor industry
Author
:
Miśra, Āśutosha, 1970-
ISBN
:
9780471316718
9780471263852
Publication Information
:
New York : Wiley-VCH, c2002.
Physical Description
:
1 online resource (xiii, 363 p.) : ill.
Subject Term
:
Chemicals -- Handbooks, manuals, etc.
Semiconductors -- Materials -- Handbooks, manuals, etc.
Added Author
:
Hogan, Jeremiah D.
Chorush, Russell.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 301477-1001 | ONLINE | | Elektronik Kütüphane |