Principles of plasma discharges and materials processing
by
Lieberman, M. A. (Michael A.)
Title
:
Principles of plasma discharges and materials processing
Author
:
Lieberman, M. A. (Michael A.)
ISBN
:
9780471724247
9780471720010
9780471724254
Edition
:
2nd ed.
Publication Information
:
Hoboken, N.J. : Wiley-Interscience, c2005.
Physical Description
:
1 online resource (xxxv, 757 p.) : ill.
Subject Term
:
Plasma dynamics.
Thin films -- Surfaces.
Plasma etching.
Plasma chemistry -- Industrial applications.
Genre
:
Electronic books.
Added Author
:
Lichtenberg, Allan J.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 301733-1001 | ONLINE | | Elektronik Kütüphane |