Enabling technology for MEMS and nanodevices
by
Baltes, H. (Henry)
Title
:
Enabling technology for MEMS and nanodevices
Author
:
Baltes, H. (Henry)
ISBN
:
9783527616701
9783527616923
Publication Information
:
Weinheim [Germany] : Wiley-VCH, c2004.
Physical Description
:
1 online resource (xii, 427 p.) : ill.
Series
:
Advanced micro & nanosystems ; v. 1
Series Title
:
Advanced micro & nanosystems ; v. 1
Subject Term
:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Added Author
:
Baltes, H. (Henry)
Added Corporate Author
:
Wiley InterScience (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 302266-1001 | ONLINE | | Elektronik Kütüphane |