CMOS-MEMS
by
 
Brand, Oliver, 1964-

Title
: 
CMOS-MEMS

Author
: 
Brand, Oliver, 1964-

ISBN
: 
9783527616718
 
9783527616930

Publication Information
: 
Weinheim ; [Great Britain] : Wiley-VCH, c2005.

Physical Description
: 
1 online resource (xiv, 594 p.) : ill.

Series
: 
Advanced micro & nanosystems ; v. 2

Series Title
: 
Advanced micro & nanosystems ; v. 2

Subject Term
: 
Metal oxide semiconductors, Complementary.
 
Microelectromechanical systems.

Added Author
: 
Brand, Oliver, 1964-
 
Fedder, G. K. (Gary K.)

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527616718


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book302267-1001ONLINEElektronik Kütüphane