CMOS-MEMS
by
Brand, Oliver, 1964-
Title
:
CMOS-MEMS
Author
:
Brand, Oliver, 1964-
ISBN
:
9783527616718
9783527616930
Publication Information
:
Weinheim ; [Great Britain] : Wiley-VCH, c2005.
Physical Description
:
1 online resource (xiv, 594 p.) : ill.
Series
:
Advanced micro & nanosystems ; v. 2
Series Title
:
Advanced micro & nanosystems ; v. 2
Subject Term
:
Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Added Author
:
Brand, Oliver, 1964-
Fedder, G. K. (Gary K.)
Added Corporate Author
:
Wiley InterScience (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 302267-1001 | ONLINE | | Elektronik Kütüphane |