Fundamental principles of optical lithography the science of microfabrication
by
Mack, Chris A.
Title
:
Fundamental principles of optical lithography the science of microfabrication
Author
:
Mack, Chris A.
ISBN
:
9780470723876
Publication Information
:
Hoboken, N.J. : Wiley ; Chichester : John Wiley [distributor], 2007.
Physical Description
:
p. cm.
Subject Term
:
Integrated circuits -- Design and construction.
Microlithography -- Industrial applications.
Added Corporate Author
:
Wiley InterScience (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 302632-1001 | ONLINE | | Elektronik Kütüphane |