Fundamental principles of optical lithography the science of microfabrication
by
 
Mack, Chris A.

Title
: 
Fundamental principles of optical lithography the science of microfabrication

Author
: 
Mack, Chris A.

ISBN
: 
9780470723876

Publication Information
: 
Hoboken, N.J. : Wiley ; Chichester : John Wiley [distributor], 2007.

Physical Description
: 
p. cm.

Subject Term
: 
Integrated circuits -- Design and construction.
 
Microlithography -- Industrial applications.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9780470723876


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book302632-1001ONLINEElektronik Kütüphane