Micro process engineering fundamentals, devices, fabrication, and applications
by
 
Kockmann, Norbert.

Title
: 
Micro process engineering fundamentals, devices, fabrication, and applications

Author
: 
Kockmann, Norbert.

ISBN
: 
9783527616961
 
9783527616749

Publication Information
: 
Weinheim : Wiley-VCH ; [Chichester : John Wiley [distributor]], c2006.

Physical Description
: 
1 online resource (xxii, 507 p.) : ill.

Series
: 
Advanced micro & nanosystems ; 5

Series Title
: 
Advanced micro & nanosystems ; 5

Subject Term
: 
Production engineering.
 
Microtechnology.

Added Author
: 
Kockmann, Norbert.

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527616749
 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0645/2006296404-b.html


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book303539-1001ONLINEElektronik Kütüphane