Reliability of MEMS
by
 
Tsuchiya, Toshiyuki.

Title
: 
Reliability of MEMS

Author
: 
Tsuchiya, Toshiyuki.

ISBN
: 
9783527622139
 
9783527622566

Publication Information
: 
Weinheim : Wiley-VCH, c2008.

Physical Description
: 
1 online resource (xx, 303 p.) : ill.

Series
: 
Advanced micro & nanosystems ; v. 6

Series Title
: 
Advanced micro & nanosystems ; v. 6

Subject Term
: 
Microelectromechanical systems -- Reliability.

Added Author
: 
Tsuchiya, Toshiyuki.
 
Tabata, Osamu, 1956-

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527622139
 
MyiLibrary, Table of contents http://www.myilibrary.com?id=194693&ref=toc
 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0838/2008459617-b.html


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book303632-1001ONLINEElektronik Kütüphane