Plasma nanoscience basic concepts and applications of deterministic nanofabrication
Ostrikov, K. (Kostya)
Plasma nanoscience basic concepts and applications of deterministic nanofabrication
Ostrikov, K. (Kostya)
Weinheim : Wiley-VCH ; Chichester : John Wiley [distributor], c2008.
1 online resource (xxv, 538 p.) : ill. (some col.)
Nanostructured materials.
Plasma engineering.
Low temperature plasmas.