Handbook of cleaning in semiconductor manufacturing fundamentals and applications
by
 
Reinhardt, Karen A.

Title
: 
Handbook of cleaning in semiconductor manufacturing fundamentals and applications

Author
: 
Reinhardt, Karen A.

ISBN
: 
9781118071748

Publication Information
: 
Salem : Scrivener ; Hoboken : John Wiley & Sons, Inc., c2011.

Physical Description
: 
xxii, 592 p.

Subject Term
: 
Semiconductors -- Surfaces -- Cleaning.

Added Author
: 
Reidy, Richard F.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
Wiley InterScience An electronic book accessible through the World Wide Web; click for information


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book303816-1001ONLINEElektronik Kütüphane