Introduction to microfabrication
by
 
Franssila, Sami.

Title
: 
Introduction to microfabrication

Author
: 
Franssila, Sami.

ISBN
: 
9781119990413
 
9780470666722

Edition
: 
2nd ed.

Publication Information
: 
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.

Physical Description
: 
1 online resource (xiv, 518 p.) : ill.

Subject Term
: 
Microelectromechanical systems.
 
Electronic apparatus and appliances.
 
Microfabrication.

Genre
: 
Electronic books.

Electronic Access
: 
Click here for the electronic version.
 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=589187
 
John Wiley http://dx.doi.org/10.1002/9781119990413
 
Books24x7 http://www.books24x7.com/marc.asp?bookid=43226
 
http://site.ebrary.com/lib/alltitles/Doc?id=10419414


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book304139-1001ONLINEElektronik Kütüphane