Introduction to microfabrication
by
Franssila, Sami.
Title
:
Introduction to microfabrication
Author
:
Franssila, Sami.
ISBN
:
9781119990413
9780470666722
Edition
:
2nd ed.
Publication Information
:
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Physical Description
:
1 online resource (xiv, 518 p.) : ill.
Subject Term
:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Genre
:
Electronic books.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 304139-1001 | ONLINE | | Elektronik Kütüphane |