Digital holography for MEMS and microsystem metrology
by
 
Asundi, Anand.

Title
: 
Digital holography for MEMS and microsystem metrology

Author
: 
Asundi, Anand.

ISBN
: 
9781119997290
 
9781119997306

Publication Information
: 
Chichester : Wiley, c2011.

Physical Description
: 
1 online resource (xxii, 205 p.)

Series
: 
Microsystem and nanotechnology series

Series Title
: 
Microsystem and nanotechnology series

Subject Term
: 
Microelectromechanical systems -- Measurement.
 
Microelectronics -- Measurement.
 
Holographic testing.

Added Author
: 
Asundi, Anand.

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9781119997290
 
http://lib.myilibrary.com?id=317798
 
http://public.eblib.com/EBLPublic/PublicView.do?ptiID=697681


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book305732-1001ONLINEElektronik Kütüphane