Handbook of wafer bonding
by
Ramm, Peter.
Title
:
Handbook of wafer bonding
Author
:
Ramm, Peter.
ISBN
:
9783527644247
Publication Information
:
Weinheim : Wiley-VCH, c2012.
Physical Description
:
1 online resource (xxxi, 395 p.) : ill. (some col.)
Subject Term
:
Semiconductor wafers -- Handbooks, manuals, etc.
Semiconductors -- Bonding -- Handbooks, manuals, etc.
Added Author
:
Ramm, Peter.
Lu, James Jian-Qiang.
Taklo, Maaike M. V.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 306162-1001 | ONLINE | | Elektronik Kütüphane |