High-k gate dielectrics for CMOS technology
by
He, Gang (Professor of physics)
Title
:
High-k gate dielectrics for CMOS technology
Author
:
He, Gang (Professor of physics)
ISBN
:
9783527646340
9783527646371
9783527646364
9783527646357
9783527330324
9781280881435
Publication Information
:
Weinheim : Wiley-VCH, 2012.
Physical Description
:
1 online resource (xxxi, 558 p.) : ill. (some col.)
Subject Term
:
Dielectrics.
Metal oxide semiconductors, Complementary.
Added Author
:
He, Gang (Professor of physics)
Sun, Zhaoqi (Professor of physics)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 306188-1001 | ONLINE | | Elektronik Kütüphane |