Glancing angle deposition of thin films : engineering the nanoscale
by
Hawkeye, Matthew M., author.
Title
:
Glancing angle deposition of thin films : engineering the nanoscale
Author
:
Hawkeye, Matthew M., author.
ISBN
:
9781118847510
9781118847329
Physical Description
:
1 online resource (xiv, 299 pages) : illustrations.
Series
:
Wiley series in materials for electronic and optoelectronic applications
Wiley series in materials for electronic and optoelectronic applications.
Subject Term
:
Nanotechnology.
Chemical vapor deposition.
Nanoelectromechanical systems -- Design and construction.
Added Author
:
Taschuk, Michael T.,
Brett, Michael J.,
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 341883-1001 | ONLINE(341883.1) | | Elektronik Kütüphane |