Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems
by
 
Feldman, Martin, editor.

Title
: 
Nanolithography : the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems

Author
: 
Feldman, Martin, editor.

ISBN
: 
9780857098757

Physical Description
: 
1 online resource (p. cm.)

Series
: 
Woodhead Publishing series in electronic and optical materials
 
Woodhead Publishing series in electronic and optical materials.

General Note
: 
Previously issued in print: 2013.

Subject Term
: 
Nanolithography.

Added Author
: 
Feldman, Martin,

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780857095008


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book355924-1001ONLINE(355924.1)Elektronik Kütüphane