Handbook of microlithography, micromachining, and microfabrication
by
 
Rai-Choudhury, P.

Title
: 
Handbook of microlithography, micromachining, and microfabrication

Author
: 
Rai-Choudhury, P.

ISBN
: 
9780819423788
 
9780819423795

Publication Information
: 
Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, c1997.

Physical Description
: 
v.

Series
: 
IEE materials and devices series ; 12A-12B
 
IEE materials & devices series ; 12A-12B.

Contents
: 
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.

Subject Term
: 
Microlithography.
 
Mikrolitografi.
 
Micromachining.
 
Mikroişleme.
 
Microfabrication.
 
Mikrofabrikasyon.

Added Author
: 
Rai-Choudhury, P.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/18/28964TK7836 H3423 1997 V.1Beytepe Genel Koleksiyon
Beytepe LibraryBook7.2/19/22845TK7836 H3423 1997 V.2Beytepe Genel Koleksiyon