Advances in chemical mechanical planarization (CMP)
by
 
Babu, S. V., editor.

Title
: 
Advances in chemical mechanical planarization (CMP)

Author
: 
Babu, S. V., editor.

ISBN
: 
9780081002186

Physical Description
: 
1 online resource.

Series
: 
Woodhead publishing series in electronic and optical materials ; number 86
 
Woodhead Publishing series in electronic and optical materials ; no. 86.

Subject Term
: 
Chemical mechanical planarization.
 
Nanoelectronics.
 
Microelectronics.

Added Author
: 
Babu, S. V.,

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780081001653


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book458681-1001ONLINEElektronik Kütüphane